Related references
Note: Only part of the references are listed.A chip-scale integrated cavity-electro-optomechanics platform
M. Winger et al.
OPTICS EXPRESS (2011)
Measuring nanomechanical motion with an imprecision below the standard quantum limit
G. Anetsberger et al.
PHYSICAL REVIEW A (2010)
A picogram- and nanometre-scale photonic-crystal optomechanical cavity
Matt Eichenfield et al.
NATURE (2009)
Piezoelectric MEMS sensors: state-of-the-art and perspectives
S. Tadigadapa et al.
MEASUREMENT SCIENCE AND TECHNOLOGY (2009)
Mechanical Oscillation and Cooling Actuated by the Optical Gradient Force
Qiang Lin et al.
PHYSICAL REVIEW LETTERS (2009)
Characterization of radiation pressure and thermal effects in a nanoscale optomechanical cavity
Ryan M. Camacho et al.
OPTICS EXPRESS (2009)
Oil and gas applications: Probing oil fields
Hilde Nakstad et al.
NATURE PHOTONICS (2008)
Ground-state cooling of a micromechanical oscillator: Comparing cold damping and cavity-assisted cooling schemes
C. Genes et al.
PHYSICAL REVIEW A (2008)
In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
U. Krishnamoorthy et al.
SENSORS AND ACTUATORS A-PHYSICAL (2008)
Optical dilution and feedback cooling of a gram-scale oscillator to 6.9 mK
Thomas Corbitt et al.
PHYSICAL REVIEW LETTERS (2007)
An optical fiber-taper probe for wafer-scale microphotonic device characterization
C. P. Michael et al.
OPTICS EXPRESS (2007)
Sub-kelvin optical cooling of a micromechanical resonator
Dustin Kleckner et al.
NATURE (2006)
High quality factor resonance at room temperature with nanostrings under high tensile stress
Scott S. Verbridge et al.
JOURNAL OF APPLIED PHYSICS (2006)
Noise analysis and characterization of a sigma-delta/capacitive microaccelerometer
H Külah et al.
IEEE JOURNAL OF SOLID-STATE CIRCUITS (2006)
Experimental evaluation and comparative analysis of commercial variable-capacitance MEMS accelerometers
C Acar et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2003)
Applications of SOI-based optical MEMS
W Noell et al.
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS (2002)
Noncontact friction and force fluctuations between closely spaced bodies
BC Stipe et al.
PHYSICAL REVIEW LETTERS (2001)
Quality factors in micron- and submicron-thick cantilevers
KY Yasumura et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2000)