4.8 Article

Femtosecond Laser Fabrication of Cavity Microball Lens (CMBL) inside a PMMA Substrate for Super-Wide Angle Imaging

Journal

SMALL
Volume 11, Issue 25, Pages 3007-3016

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/smll.201403419

Keywords

cavity microball lens; femtosecond lasers; micromachining; micro-telescope; wide angle imaging

Funding

  1. National Natural Science Foundation of China [50875007]
  2. Ministry of Science and Technology of China Major Project of Scientific Instruments and Equipment Development [2011YQ030112]
  3. Key Projects of Science and Technology of Beijing Municipal Commission of Education [KZ201210005009, KZ201410005001]
  4. Beijing Natural Science Foundation [4132017]
  5. Beijing high level overseas talent project
  6. University of Tennessee

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Since microlenses have to date been fabricated primarily by surface manufacturing, they are highly susceptible to surface damage, and their microscale size makes it cumbersome to handle. Thus, cavity lenses are preferred, as they alleviate these difficulties associated with the surface-manufactured microlenses. Here, it is shown that a high repetition femtosecond laser can effectively fabricate cavity microball lenses (CMBLs) inside a polymethyl methacrylate slice. Optimal CMBL fabrication conditions are determined by examining the pertinent parameters, including the laser processing time, the average irradiation power, and the pulse repetition rates. In addition, a heat diffusion modeling is developed to better understand the formation of the spherical cavity and the slightly compressed affected zone surrounding the cavity. A micro-telescope consisting of a microscope objective and a CMBL demonstrates a super-wide field-of-view imaging capability. Finally, detailed optical characterizations of CMBLs are elaborated to account for the refractive index variations of the affected zone. The results presented in the current study demonstrate that a femtosecond laser-fabricated CMBL can be used for robust and super-wide viewing micro imaging applications.

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