Journal
NANOTECHNOLOGY
Volume 21, Issue 8, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/21/8/085302
Keywords
-
Funding
- EU [NMP2-CT-2006-016424]
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Fabrication of periodic nanodot or nanocolumn arrays on surfaces is performed by top-down lithographic procedures or bottom-up self-assembly methods, which both make use of plasma etching to transfer the periodic pattern. Could plasma etching alone act as an assembly-organization method to create the pattern and then transfer it to the substrate? We present data that support this idea and propose a mechanism of periodicity formation where etching and simultaneous deposition take place.
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