Journal
NANOTECHNOLOGY
Volume 21, Issue 43, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/21/43/435301
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A generic, CMOS compatible strategy for transferring a block copolymer template to a semiconductor substrate is demonstrated. An aluminum oxide (Al2O3) hard mask is selectively deposited by atomic layer deposition in an organized array of holes obtained in a PS matrix via PS-b-PMMA self-assembly. The Al2O3 nanodots act as a highly resistant mask to plasma etching, and are used to pattern high aspect ratio (> 10) silicon nanowires and nanopillars.
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