The synthesis of single layers of Ag nanocrystals by ultra-low-energy ion implantation for large-scale plasmonic structures

Single layers of silver (Ag) nanoparticles embedded in silica (SiO(2)) have been fabricated by ultra-low-energy ion implantation. The distance between the Ag particles and the free SiO(2) surface is controlled with nanometer precision. Raman scattering and reflectivity measurements strongly correlate to transmission electron microscopy analyses, allowing the use of these non-invasive techniques to monitor structural and dynamical properties. These results open up new opportunities to manipulate electromagnetic near-field interactions on wafer-scale plasmonic devices.