Journal
NANOTECHNOLOGY
Volume 20, Issue 9, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/20/9/095502
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A multi-walled carbon nanotube (MWNT) bimorph nanoactuator has been modeled, fabricated and characterized. A thin aluminum film was uniformly deposited on the sidewalls of MWNTs using a pulsed laser deposition method to create the bimorph nanostructure. For a temperature change from 290 to 690 K with measured dimensions of 100 +/- 20 nm for the MWNT diameter, 40 +/- 10 nm for the Al thickness, and 5.2 +/- 0.5 mu m for the bimorph length, the measured deflection was 550 +/- 200 nm, which was in good agreement with the calculation. The actuation force was measured using a lateral force microscopy technique, and the measured values agreed well with the prediction based on the model. The nanoactuator generated a mu N force at its tip.
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