Journal
NANOTECHNOLOGY
Volume 20, Issue 47, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/20/47/475302
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We describe a method based on silicon micromachining to machine single-crystalline silicon nanoparticles bounded by (111) faces in the form of tetrahedra. The technology allows the fabrication of tetrahedra in a size range from 20 to 1000 nm side length, and gives the possibility to chemically modify sites (faces, edges and/or tips) within certain limits. The chemical modification is anticipated to facilitate the self-assembly into new supermaterials such as photonic crystals in the diamond lattice.
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