Journal
NANOTECHNOLOGY
Volume 20, Issue 1, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/20/1/015501
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Funding
- Swiss National Science Foundation (SNSF)
- Japan Society for the Promotion of Science (JSPS)
- Canon Foundation in Europe
- JGC-S Scholarship Foundation
- Institute for Materials Research (IMR), Japan
- World Premier International Research Center (WPI) Initiative on Materials Nanoarchitronics, MEXT, Japan
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The performance of microfabricated piezoresistive cantilever array sensors has been evaluated using various vapors of volatile organic compounds including alkanes with different chain length from 5 (n-pentane) to 14 (n-tetradecane). We demonstrate that piezoresistive microcantilever array sensors have the selectivity of discriminating individual alkanes in a homologous series as well as common volatile organic compounds according to principal component analysis. We developed a new method to evaluate the sensitivity, taking advantage of the low vapor pressures of alkanes with longer chains, such as n-dodecane, n-tridecane and n-tetradecane, under saturated vapor conditions. This method reveals sub-ppm sensitivity and the cantilever response is found to follow the mass of evaporated analytes as calculated using a quantitative model based on the Langmuir evaporation model.
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