Enhanced material purity and resolution via synchronized laser assisted electron beam induced deposition of platinum

We introduce a laser assisted electron beam induced deposition (LAEBID) process which is a nanoscale direct write synthesis method that integrates an electron beam induced deposition process with a synchronized pulsed laser step to induce thermal desorption of reaction by-products. Localized, spatially overlapping electron and photon pulses enable the thermal desorption of the reaction by-product while mitigating issues associated with bulk substrate heating, which can shorten the precursor residence time and distort pattern fidelity due to thermal drift. Current results demonstrate purification of platinum deposits (reduced carbon content by similar to 50%) with the addition of synchronized laser pulses as well as a significant reduction in deposit resistivity. Measured resistivities from platinum LAEBID structures (4 x 10(3) mu Omega cm) are nearly 4 orders of magnitude lower than standard EBID platinum structures (2.2 x 10(7) mu Omega cm) from the same precursor and are lower than the lowest reported EBID platinum resistivity with post-deposition annealing (1.4 x 10(4) mu Omega cm). Finally the LAEBID process demonstrates improved deposit resolution by similar to 25% compared to EBID structures under the conditions investigated in this work.