Journal
NANOSCALE
Volume 5, Issue 3, Pages 1221-1226Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/c2nr33034b
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Funding
- Priority Research Centers Program [2012-0005859]
- Basic Science Research Program [2012-0007298, 2012-040278]
- Nanomaterial Technology Development Program [2012M3A7B4049888]
- Center for Topological Matter in POSTECH through the National Research Foundation of Korea (NRF) [2011-0030786]
- Ministry of Education, Science and Technology (MEST) [2012-014248, 2012-0006233]
- NRF
- Center for Advanced Soft Electronics under the Global Frontier Research Program of the Ministry of Education, Science and Technology [2011-0031637]
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A single-layer graphene is synthesized on Cu foil in the absence of H-2 flow by plasma enhanced chemical vapor deposition (PECVD). In lieu of an explicit H-2 flow, hydrogen species are produced during the methane decomposition process into their active species (CHx<4), assisted with the plasma. Notably, the early stage of growth depends strongly on the plasma power. The resulting grain size (the nucleation density) has a maximum (minimum) at 50 W and saturates when the plasma power is higher than 120 W because hydrogen partial pressures are effectively tuned by a simple control of the plasma power. Raman spectroscopy and transport measurements show that decomposed methane alone can provide a sufficient amount of hydrogen species for high-quality graphene synthesis by PECVD.
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