Journal
NANOSCALE
Volume 1, Issue 3, Pages 331-338Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/b9nr00106a
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Funding
- Korea Science & Engineering Foundation [200702605]
- King Abdullah University of Science and Technology (KAUST) [K.UK-F1-037-02]
- Micro Thermal System Research Center at Seoul National University
- National Research Foundation of Korea [과C6A1803] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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This feature article provides an overview of the recently developed two-step UV-assisted capillary force lithoaraphy and its application to fabricating well-defined micro/nanoscale hierarchical structures. This method utilizes an oxygen inhibition effect in the course of UV irradiation curing and a two-step moulding process, to form multiscale hierarchical or suspended nanobridge structures in a rapid and reproducible manner. After a brief description of the fabrication principles, several examples of the two-step UV-assisted moulding technique are presented. In addition, emerging applications of the multiscale hierarchical structures are briefly described.
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