Journal
NANO RESEARCH
Volume 1, Issue 2, Pages 158-165Publisher
TSINGHUA UNIV PRESS
DOI: 10.1007/s12274-008-8012-9
Keywords
Single-walled carbon nanotubes (SWNTs); chemical vapor deposition (CVD); photolithography; microcontact printing (mu CP)
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Funding
- Army Research Office
- Office of Naval Research
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Here we present an easy one-step approach to pattern uniform catalyst lines for the growth of dense, aligned parallel arrays of single-walled carbon nanotubes (SWNTs) on quartz wafers by using photolithography or polydimethylsiloxane (PDMS) stamp microcontact printing (mu CP). By directly doping an FeCl3/methanol solution into Shipley 1827 photoresist or polyvinylpyrrolidone (PVP), various catalyst lines can be well-patterned on a wafer scale. In addition, during the chemical vapor deposition (CVD) growth of SWNTs the polymer layers play a very important role in the formation of mono-dispersed nanoparticles. This universal and efficient method for the patterning growth of SWNTs arrays on a surface is compatible with the microelectronics industry, thus enabling of the fabrication highly integrated circuits of SWNTs.
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