4.8 Article

Subsurface Nanoimaging by Broadband Terahertz Pulse Near-Field Microscopy

Journal

NANO LETTERS
Volume 15, Issue 1, Pages 549-552

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/nl503998v

Keywords

Terhertz; near-field microscopy; subsurface nanoimaging; nanospectroscopy

Funding

  1. National Research Foundation of Korea (NRF) grant - Korea government (MSIP) [2009-0083512]

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Combined with terahertz (THz) time-domain spectroscopy, THz near-field microscopy based on an atomic force microscope is a technique that, while challenging to implement, is invaluable for probing low-energy light-matter interactions of solid-state and biomolecular nanostructures, which are usually embedded in background media. Here, we experimentally demonstrate a broadband THz pulse near-field microscope that provides subsurface nanoimaging of a metallic grating embedded in a dielectric film. The THz near-field microscope can obtain broadband nanoimaging of the subsurface grating with a nearly frequency-independent lateral resolution of 90 nm, corresponding to similar to lambda/3300, at 1 THz, while the AFM only provides a flat surface topography.

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