4.8 Article

High Mobility WSe2 p- and n-Type Field-Effect Transistors Contacted by Highly Doped Graphene for Low-Resistance Contacts

Journal

NANO LETTERS
Volume 14, Issue 6, Pages 3594-3601

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/nl501275p

Keywords

MoS2; WSe2; field-effect transistor; graphene; Schottky barrier; ionic-liquid gate

Funding

  1. NSF [ECCS-1128297, DMR-1308436]
  2. NSF CAREER Award [1055932]
  3. MRI Award [1229635]
  4. Wayne State University
  5. Materials and Engineering Division, Office of Basic Energy Sciences, U.S. Department of Energy
  6. National Science Foundation [EEC-0832785]
  7. Division Of Materials Research
  8. Direct For Mathematical & Physical Scien [1308436] Funding Source: National Science Foundation
  9. Div Of Electrical, Commun & Cyber Sys
  10. Directorate For Engineering [1128297] Funding Source: National Science Foundation
  11. Div Of Electrical, Commun & Cyber Sys
  12. Directorate For Engineering [1229635] Funding Source: National Science Foundation

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We report the fabrication of both n-type and p-type WSe2 field-effect transistors with hexagonal boron nitride passivated channels and ionic-liquid (IL)-gated graphene contacts. Our transport measurements reveal intrinsic channel properties including a metal-insulator transition at a characteristic conductivity close to the quantum conductance e(2)/h, a high ON/OFF ratio of >10(7) at 170 K, and large electron and hole mobility of mu approximate to 200 cm(2) V-1 s(-1) at 160 K. Decreasing the temperature to 77 K increases mobility of electrons to similar to 330 cm(2) V-1 s(-1) and that of holes to similar to 270 cm(2) V-1 s(-1). We attribute our ability to observe the intrinsic, phonon-limited conduction in both the electron and hole channels to the drastic reduction of the Schottky barriers between the channel and the graphene contact electrodes using IL gating. We elucidate this process by studying a Schottky diode consisting of a single graphene/WSe2 Schottky junction. Our results indicate the possibility to utilize chemically or electrostatically highly doped graphene for versatile, flexible, and transparent low-resistance ohmic contacts to a wide range of quasi-2D semiconductors.

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