Journal
NANO LETTERS
Volume 12, Issue 6, Pages 3115-3120Publisher
AMER CHEMICAL SOC
DOI: 10.1021/nl300990q
Keywords
Size dependent; kinetic competition; suicide; diffusion; silicon nanowire; phase sequence
Categories
Funding
- Center on Functional Engineered Nano Architectonics (FENA), Henry Samueli School of Engineering and Applied Science
- Sloan Research Fellowship
Ask authors/readers for more resources
The first phase selection and the phase formation sequence between metal and silicon (Si) couples are indispensably significant to microelectronics. With increasing scaling of device dimension to nano regime, established thermodynamic and kinetic models in bulk and thin film fail to apply in 1-D nanostructures. Herein, we present an unique size-dependent first phase formation sequence in 1-D nanostructures, with Ni-Si as the model system. Interfacial-limited phase which forms the last in thin film, NiSi2, appears as the dominant first phase at 300-800 degrees C due to the elimination of continuous grain boundaries in 1-D suicides. On the other hand, theta-Ni2Si, the most competitive diffusion-limited phase takes over NiSi2 and wins out as the first phase in small diameter nanowires at 800 degrees C. Kinetic parameters extracted from in situ transmission electron microscope studies and a modified kinetic growth competition model quantitatively explain this observation. An estimated critical diameter from the model agrees reasonably well with observations.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available