4.8 Article

Graphene-Based Bimorph Microactuators

Journal

NANO LETTERS
Volume 11, Issue 3, Pages 977-981

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/nl103618e

Keywords

Graphene; actuator; organic; thermal; mechanical; sensor

Funding

  1. Basic Science Research Program [2010-0015035]
  2. WCU [R32-2008-000-10124-0]
  3. National Research Foundation under the Ministry of Education, Science and Technology, Korea [2010K-000196]
  4. National Science Foundation, USA
  5. National Research Foundation of Korea [2009-0093247, R32-2011-000-10124-0, 2009-0093248] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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A novel graphene-on-organic film fabrication method that is compatible with a batch microfabrication process was developed and used for electromechanically driven microactuators. A very thin layer of graphene sheets was monolithically integrated and the unique material characteristics of graphene including negative thermal expansion and high electrical conductivity were exploited to produce a bimorph actuation. A large displacement with rapid response was observed while maintaining the low power consumption. This enabled the successful demonstration of transparent graphene-based organic microactuators.

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