Journal
NANO LETTERS
Volume 11, Issue 12, Pages 5247-5251Publisher
AMER CHEMICAL SOC
DOI: 10.1021/nl2026663
Keywords
Si nanowire; amorphous substrate; growth; guided growth; nanopatterned catalyst; host mediation; nanoimprint lithography
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Funding
- Defense Advanced Research Projects Agency (DARPA) MTO through Stanford University
- National Science Foundation
- MRSEC through the Princeton Center for Complex Materials [DMR-0819860]
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We report a new approach, termed growth by nanopatterned host-medicated catalyst (NHC growth), to solve nonuniformities of Si nanowires (NWs) grown on amorphous substrates. Rather than pure metal catalyst, the NHC uses a mixture of metal catalyst with the material to be grown (i.e., Si), nanopatterns them into desired locations and anneals them. The Si host ensures one catalyst-dot per-growth-site, prevents catalyst-dot break-up, and crystallizes catalyst-dot (hence orientating NWs). The growth results straight silicon NWs on SiO(2) with uniform length and diameter (4% deviation), predetermined locations, preferred orientation, one-wire per-growth-site, and high density; all are 10-100 times better than conventional growth.
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