4.8 Article

Nanoelectromechanical Resonator Arrays for Ultrafast, Gas-Phase Chromatographic Chemical Analysis

Journal

NANO LETTERS
Volume 10, Issue 10, Pages 3899-3903

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/nl101586s

Keywords

NEMS; gas chromatography; gas detectors; mass sensing

Funding

  1. Defense Advanced Research Projects Agency via DARPA/MTO-MGA [NBCHI050001]
  2. Department of Homeland Security Sandia is a multiprogram laboratory operated by Sandia Corporation
  3. Lockheed Martin Company, for the United States Department of Energy [DE-AC04-94AL85000]

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Miniaturized gas chromatography (GC) systems can provide fast, quantitative analysis of chemical vapors in an ultrasmall package. We describe a chemical sensor technology based on resonant nanoelectromechanical systems (NEMS) mass detectors that provides the speed, sensitivity, specificity, and size required by the microscale GC paradigm. Such NEMS sensors have demonstrated detection of subparts per billion (ppb) concentrations of a phosphonate analyte. By combining two channels of NEMS detection with an ultrafast GC front-end, chromatographic analysis of 13 chemicals was performed within a 5 s time window.

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