Journal
NANO LETTERS
Volume 10, Issue 4, Pages 1421-1428Publisher
AMER CHEMICAL SOC
DOI: 10.1021/nl100326q
Keywords
Soft lithography; molding; replica molding; nanofabrication; PRINT; perfluoropolyether
Categories
Funding
- National Science Foundation [CMS-0507151]
- UNC EFRC
- U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences [DE-SC0001011]
- Office of Naval Research
- Liquidia Technologies
- Division of Scientific User Facilities, U.S. Department of Energy
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Several perfluoropolyether (PFPE)-based elastomers for high-resolution replica molding applications are explored. The modulus of the elastomeric materials was increased through synthetic and additive approaches while maintaining relatively low surface tension values (<25 mN/m). Using large area (>4 in.(2)) master templates, we experimentally show the relationship between mold resolution and material properties such as modulus and surface tension for materials used in this study. A composite mold approach was used to form flexible molds out of stiff, high modulus materials that allow for replication of sub-20 nm post structures. Sub-100 nm line grating master templates, formed using e-beam lithography, were used to determine the experimental stability of the molding materials. It was observed that as the feature spacing decreased. high modulus PFPE tetramethacrylate (TMA) composite molds were able to effectively replicate the nanograting structures without cracking or tear-out defects that typically occur with high modulus elastomers.
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