Journal
NANO LETTERS
Volume 10, Issue 7, Pages 2537-2542Publisher
AMER CHEMICAL SOC
DOI: 10.1021/nl101107u
Keywords
Cantilever; mass sensor; nanochannel resonator; nanoelectromechanical systems; suspended microchannel resonator
Categories
Funding
- CIMIT [09-440]
- Institute for Collaborative Biotechnologies, U S Army Research Office [DAAD 1903D0004]
- Max Planck Society
- Max Planck Institute for Biophysical Chemistry
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Using suspended nanochannel resonators (SNRs), we demonstrate measurements of mass in solution with a resolution of 27 ag in a 1 kHz bandwidth, which represents a 100-fold improvement over existing suspended microchannel resonators and, to our knowledge, is the most precise mass measurement in liquid today The SNR consists of a cantilever that is 50 mu m long, 10 mu m wide, and 1 3 mu m thick, with an embedded nanochannel that is 2 mu m wide and 700 nm tall The SNR has a resonance frequency near 630 kHz and exhibits a quality factor of approximately 8000 when dry and when filled with water In addition, we introduce a new method that uses centrifugal force caused by vibration of the cantilever to trap particles at the free end This approach eliminates the intrinsic position dependent error of the SNR and also improves the mass resolution by increasing the averaging time for each particle
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