Journal
NANO LETTERS
Volume 9, Issue 5, Pages 2044-2048Publisher
AMER CHEMICAL SOC
DOI: 10.1021/nl900309s
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Funding
- Ministry of Education in Korea
- Korea Science and Engineering Foundation (KOSEF) through the NANO Systems Institute (NSI) at Seoul National University
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We report a new method to fabricate electrode-embedded multiple nanopore structures with sub-10 nm diameter, which is designed for electrofluidic applications such as ionic field effect transistors. Our method involves patterning pore structures on membranes using e-beam lithography and shrinking the pore diameter by a self-limiting atomic layer deposition process. We demonstrate that 70-80 nm diameter pores can be shrunk down to sub-10 nm diameter and that the ionic transport of KCl electrolyte can be efficiently manipulated by the embedded electrode within the membrane.
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