Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 219, Issue -, Pages 43-49Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2015.05.020
Keywords
Interdigitated back-contact photovoltaic cell; Humidity sensor; Photodetector; WO3; Ga2O3
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Self-powered multi-functional sensors were fabricated by integrating a crystalline Si interdigitated back-contact (IBC) photovoltaic (PV) cell with a vertically stacked structure into a single chip. The IBC PV cell was vertically connected with a humidity sensor and a photodetector (PD) in parallel. The measured humidity current of the WO3 thin-film humidity sensor increased monotonically when the relative humidity was increased from 30% to 95%. In addition, the humidity characteristics of the unannealed WO3 thin-film humidity sensor were better than those of the annealed samples. The cutoff wavelengths of WO3 and Ga2O3 thin-film PDs were around 370 and 250 nm, respectively. The measured responsivity of WO3 and Ga2O3 thin-film PDs at the cutoff wavelength were 1.7 x 10(-7) and 9.8 x 10(-7) A/W, respectively, under 1-sun illumination. (C) 2015 Elsevier B.V. All rights reserved.
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