4.8 Article

Planar GaAs Nanowires on GaAs (100) Substrates: Self-Aligned, Nearly Twin-Defect Free, and Transfer-Printable

Journal

NANO LETTERS
Volume 8, Issue 12, Pages 4421-4427

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/nl802331m

Keywords

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Funding

  1. University of Illinois, and the National Science Foundation
  2. CAREER [ECCS 07-47178, DMI-0328162]
  3. U.S. Department of Energy [DEFG02-01ER45923, DEFG02-91-ER45439]
  4. Center for Microanalysis of Materials at the Frederick Seitz Materials Research Laboratory
  5. Directorate For Engineering
  6. Div Of Electrical, Commun & Cyber Sys [0747178] Funding Source: National Science Foundation

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We report the controlled growth of planar GaAs semiconductor nanowires on (100) GaAs substrates using atmospheric pressure metalorganic chemical vapor deposition with Au as catalyst. These nanowires with uniform diameters are self-aligned in < 110 > direction in the plane of (100). The dependence of planar nanowire morphology and growth rate as a function of growth temperature provides insights into the growth mechanism and identified an ideal growth window of 470 +/- 10 degrees C for the formation of such planar geometry. Transmission electron microscopy images reveal clear epitaxial relationship with the substrate along the nanowire axial direction, and the reduction of twinning defect density by about 3 orders of magnitude compared to < 111 > III-V semiconductor nanowires. In addition, using the concept of sacrificial layers and elevation of Au catalyst modulated by growth condition, we demonstrate for the first time a large area direct transfer process for nanowires formed by a bottom-up approach that can maintain both the position and alignment. The planar geometry and extremely low level of crystal imperfection along with the transferability could potentially lead to highly integrated III-V nanoelectronic and nanophotonic devices on silicon and flexible substrates.

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