Journal
NANO LETTERS
Volume 8, Issue 9, Pages 2872-2877Publisher
AMER CHEMICAL SOC
DOI: 10.1021/nl801615c
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Funding
- MESA+ Institute for Nanotechnology
- Strategic Research Orientations Advanced Photonic Structures and Nanofabrication
- NanoNed, a nanotechnology program of the Dutch Ministry of Economic Affairs
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A novel inverse imprinting procedure for nanolithography is presented which offers a transfer accuracy and feature definition that is comparable to state-of-the-art nanofabrication techniques. We illustrate the fabrication quality of a demanding nanophotonic structure: a photonic crystal waveguide. Local examination using photon scanning tunneling microscopy (PSTM) shows that the resulting nanophotonic structures have excellent guiding properties at wavelengths in the telecommunications range, which indicates a high quality of the local structure and the overall periodicity.
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