Journal
NANO
Volume 8, Issue 4, Pages -Publisher
WORLD SCIENTIFIC PUBL CO PTE LTD
DOI: 10.1142/S1793292013500410
Keywords
Moisture barrier; plasma polymerization; aluminum oxide; bending radius
Funding
- National Research Foundation of Korea (NRF)
- Ministry of Education, Science and Technology [2011-0006268]
- MKE (The Ministry of Knowledge Economy), Korea under the ITRC (Information Technology Research Center)/CITRC (Convergence Information Technology Research Center) support program [NIPA-2012-H0301-12-4013]
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We report a multilayer moisture barrier structure comprised of alternating inorganic aluminum oxide and plasma-polymerized organic layers. The inorganic and organic layers were grown by atomic layer deposition (ALD) and plasma polymerization in vacuum, respectively. The inclusion of plasma-polymerized layers in the multilayer barrier structure enhanced the moisture barrier performance by around 15% for as-deposited samples. After being subjected to 10 000 bending cycles with a bending radius of 2 cm, however, the moisture barrier performance of the multilayer structure was improved by 50% from that of pure inorganic counterpart.
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