Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 233, Issue -, Pages 239-245Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2015.07.001
Keywords
Distal fiber scanning; Fiber scanner; Electrothermal actuation; Microactuator; MEMS stage; Micro-platform; Large range
Funding
- National Science Foundation [1002209]
- National Institutes of Health [R01 CA153023]
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Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonant scanning. The micro-platform has a large piston scan range of up to 800 pm at only 6 V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 mu m for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications. (C) 2015 Elsevier B.V. All rights reserved.
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