Related references
Note: Only part of the references are listed.Study of hydrophilicity and stability of chemically modified PDMS surface using piranha and KOH solution
Debashis Maji et al.
SURFACE AND INTERFACE ANALYSIS (2012)
Hydrophilization and hydrophobic recovery of PDMS by oxygen plasma and chemical treatment - An SEM investigation
Dhananjay Bodas et al.
SENSORS AND ACTUATORS B-CHEMICAL (2007)
Comparative study of spin coated and sputtered PMMA as an etch mask material for silicon micromachining
DS Bodas et al.
SENSORS AND ACTUATORS A-PHYSICAL (2005)
Etch rates for micromachining processing - Part II
KR Williams et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2003)
Anisotropic etching of {100} and {110} planes in (100) silicon
O Powell et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2001)