Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 19, Issue 5, Pages 743-748Publisher
SPRINGER
DOI: 10.1007/s00542-012-1677-8
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Funding
- Pioneer Research Center Program through the National Research Foundation of Korea
- Ministry of Education, Science and Technology [2010-0019453]
- National Research Foundation of Korea (NRF)
- Korea government (MEST) [2009-0076641]
- National Research Foundation of Korea [2009-0076641] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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In this paper, we propose a simple and low-cost fabrication technique for patterning carbon nanotube (CNT) films on polydimethylsiloxane (PDMS), which can be used in flexible sensors and electronics. We demonstrate CNT patterning on both recessed and flat PDMS surfaces using a standard photolithography method. By this proposed technique, we were able to fabricate a CNT film, having a high flexibility and good conductivity, on a PDMS surface. A CNT pattern with a minimum feature resolution of 150 mu m was obtained using the proposed fabrication technique. The sheet resistance of the CNT film on the PDMS surface was determined to be in the 100-280 Omega/sq range. The thickness and resultant resistivity of the CNT film can be easily controlled by controlling just the spray duration. Furthermore, the gauge factor of the proposed device is higher than that of metal and it increases as the thickness of the CNT film increases.
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