Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 16, Issue 8-9, Pages 1287-1292Publisher
SPRINGER
DOI: 10.1007/s00542-009-0953-8
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The project FELIG sets a milestone in X-ray-LIGA technology. The first automated LIGA production is brought online. The units have been implemented at the synchrotron source ANKA at Forschunszentrum Karlsruhe. They are linked via a conveyor line and controlled by a superior software system. Other process steps as resist technique have been partly automated. The whole process has been adapted to a wafer format of 6aEuro(3). Automation and enlargement of formats will reduce production costs for LIGA components and help LIGA technique for industrial breakthrough.
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