☆ 4.5 Article

High Energy BSE/SE/STEM Imaging of 8 um Thick Semiconductor Interconnects

MICROSCOPY AND MICROANALYSIS (2014)

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Journal

MICROSCOPY AND MICROANALYSIS
Volume 20, Issue S3, Pages 8-9

Publisher

Cambridge University Press (CUP)
DOI: 10.1017/s1431927614001767

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Categories

Materials Science, Multidisciplinary

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