Journal
MICROSCOPY AND MICROANALYSIS
Volume 16, Issue 5, Pages 614-621Publisher
CAMBRIDGE UNIV PRESS
DOI: 10.1017/S1431927610000334
Keywords
parallel electron diffraction; nanobeam; TEM/STEM; nanoparticles; nanowires; spot diffraction patterns
Categories
Funding
- Semiconductor Research Corporation [2008-KJ-1854]
Ask authors/readers for more resources
An electron diffraction technique called D-STEM has been developed in a transmission electron microscopy/scanning transmission electron microscopy (TEM/STEM) instrument to obtain spot electron diffraction patterns from nanostructures, as small as similar to 3 nm. The electron ray path achieved by configuring the pre- and postspecimen illumination lenses enables the formation of a 1-2 nm near-parallel probe, which is used to obtain bright-field/dark-field STEM images. Under these conditions, the beam can be controlled and accurately positioned on the STEM image, at the nanostructure of interest, while sharp spot diffraction patterns can be simultaneously recorded on the charge-coupled device camera. When integrated with softwares such as Gatan (TM) STEM diffraction imaging and Automated Crystallography for TEM or Digistar (TM), NanoMEGAS, the D-STEM technique is very powerful for obtaining automated orientation and phase maps based on diffraction information acquired on a pixel by pixel basis. The versatility of the D-STEM technique is demonstrated by applying this technique to nanoparticles, nanowires, and nano interconnect structures.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available