Journal
MICROPOROUS AND MESOPOROUS MATERIALS
Volume 149, Issue 1, Pages 142-146Publisher
ELSEVIER
DOI: 10.1016/j.micromeso.2011.08.018
Keywords
Silicon oxynitride; Closed porosity; Tailored refractive index; Mechanical stability
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Funding
- EC
- CSIC [2010601041, 201060E102]
- Spainish Ministry MICINN
- Junta de Andalucia [TEP 217]
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Amorphous silicon oxynitride coatings with similar composition and different closed porosity were prepared by magnetron sputtering. Pores size, shape and distribution were evaluated by scanning electron microscopy and transmission electron microscopy. Raman and EELS analysis proved that the pores are filled with molecular nitrogen trapped during deposition. The mechanical properties evaluated by nanoindentation shows that the presence of closed nano-porosity does not compromise the mechanical integrity of these coatings. The introduction of closed porosity is shown as a good strategy for obtaining lower dielectric constant silicon oxynitride coatings with similar composition while keeping the good mechanical properties (similar to 13 GPa) characteristic of this type of coatings. The presence of close porosity gives also a good stability of coatings properties as compared to open porosity microstructures where gas phase in contact with the coatings can affect coatings properties. (C) 2011 Elsevier Inc. All rights reserved.
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