Journal
MICROFLUIDICS AND NANOFLUIDICS
Volume 15, Issue 3, Pages 377-386Publisher
SPRINGER HEIDELBERG
DOI: 10.1007/s10404-013-1155-3
Keywords
Nanocrystalline diamond film; Surface acoustic wave; Pumping and jetting; Efficiency
Funding
- Fundamental Research Funds for the Central Universities [ZYGX 2009J046, ZYGX2009X007]
- Sichuan Young Scientists Foundation [2010JQ0006]
- Royal Society-Research Grant [RG090609]
- Carnegie Trust
- Royal Society of Edinburgh
- Royal Academy of Engineering-Research Exchanges with China
- Royal Academy of Engineering-Research Exchanges with India
- EPSRC [EP/F063865/1, EP/F06294X/1]
- National Natural Science Foundation of China (NSFC) [61150110485]
- EPSRC [EP/F063865/1, EP/F06294X/1] Funding Source: UKRI
- Engineering and Physical Sciences Research Council [EP/F063865/1, EP/F06294X/1] Funding Source: researchfish
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Ultra-smooth nanocrystalline diamond (UNCD) films with high-acoustic wave velocity were introduced into ZnO-based surface acoustic wave (SAW) devices to enhance their microfluidic efficiency by reducing the acoustic energy dissipation into the silicon substrate and improving the acoustic properties of the SAW devices. Microfluidic efficiency of the ZnO-based SAW devices with and without UNCD inter layers was investigated and compared. Results showed that the pumping velocities increase with the input power and those of the ZnO/UNCD/Si devices are much larger than those of the ZnO/Si devices at the same power. The jetting efficiency of the droplet was improved by introducing the UNCD interlayer into the ZnO/Si SAW device. Improvement in the microfluidic efficiency is mainly attributed to the diamond layer, which restrains the acoustic wave to propagate in the top layer rather than dissipating into the substrate.
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