4.3 Article

A study on the tensile fracture mechanism of 15 mu m copper wire after EFO process

Journal

MICROELECTRONICS RELIABILITY
Volume 51, Issue 1, Pages 25-29

Publisher

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.microrel.2010.04.007

Keywords

-

Funding

  1. National Cheng Kung University
  2. Center for Micro/Nano Science and Technology (NCKU) [D98-2700]
  3. [NSC 98-2221-E-006-068]
  4. [NSC 98-2622-E-006-024-CC3]

Ask authors/readers for more resources

In this study, 15 mu m copper wires were bonded on substrates with thermosonic process, and the tensile fracture characteristics of FAB, as well as bonded samples, were investigated. For electronic packaging applications, all 15 mu m wires were fully annealed, and the microstructures consisted of equiaxed grains. After EFO (electric flame-off) process, the microstructure of wire can be divided into three parts: (1) free air ball (FAB) with columnar grains, (2) heat-affected zone (HAZ) with equal-diameter grains, (3) annealing zone with equiaxed grains. According to tensile test results, EFO process simultaneously reduced UTS and elongation of the wire. For both FAB and bonded samples, the tensile fracture zones were either in the region of equal-diameter grains or in coarse grains located within 100 mu m from the ball. And it was observed that the breakage sites appeared near the twins and the columnar grains when tensile fracture happened. Meanwhile, the relationship between hardness and microstructure of wires after EFO process were analyzed with nano-indentation. The nano-hardness value of 15 mu m wire was 1.2-1.45 GPa. (C) 2010 Published by Elsevier Ltd.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.3
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available