Journal
MICROELECTRONICS RELIABILITY
Volume 50, Issue 5, Pages 753-756Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.microrel.2010.01.025
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In this study, the ruthenium-doped titanium dioxide (TiO2:Ru) sensing film is fabricated by co-sputtering system. The TiO2:Ru sensing film is treated by thermal annealing process at 600 degrees C for 1 h in atmosphere. We present a TiO2:Ru-based pH sensor which can obtain the higher sensing value at 64.58 mV/pH for the super-Nernstian response. The enzyme composite solution is dropped on the TiO2:Ru sensing film as a glucose biosensor. In the concentration ranging from 100 to 500 (mg/dL) of glucose solution, the sensitivity and linearity of TiO2:Ru sensing film after thermal annealing are 0.320 mV(mg/dL)(-1) and 0.995, respectively, which is better than non-annealing TiO2:Ru sensing film. In this study, we can describe a novel doping method to prepare the TiO2:Ru sensing film and the glucose biosensors. (C) 2010 Elsevier Ltd. All rights reserved.
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