Journal
MICROELECTRONICS RELIABILITY
Volume 49, Issue 6, Pages 579-584Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.microrel.2009.02.016
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A new thick-film photoimageable platinum paste has been elaborated. The paste is less sensitive to the visible light. The resolution line/space 20/30 mu m is achievable. The application of the elaborated paste to produce heaters is demonstrated. The stability of the heaters has been evaluated. (C) 2009 Elsevier Ltd. All rights reserved.
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