4.4 Article

Low frequency graphene resonators for acoustic sensing

Journal

MICROELECTRONIC ENGINEERING
Volume 119, Issue -, Pages 105-108

Publisher

ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2014.02.036

Keywords

Graphene; Raman; Young's modulus; Resonant frequency; Acoustic sensing; MEMS

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Graphene resonators have been fabricated in rectangular and circular geometries ranging from 1 to 3 mm in diameter. The resonant frequencies have been measured, and fitted to an analytical model. An optical profile of the graphene sheet has been taken, and the monolayer graphene has been confirmed to be of high quality using Raman spectroscopy. The graphene membranes have shown hookean behaviour with no evidence of deformation. The characterisation of the single layer graphene sheet on this large scale provides new information previously unavailable on the mechanical stability of graphene with ultra high aspect ratio. (C) 2014 Elsevier B.V. All rights reserved.

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