Journal
MICROELECTRONIC ENGINEERING
Volume 98, Issue -, Pages 409-413Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2012.04.027
Keywords
Focused-ion-beam; Freestanding; Platinum nanopillar; Controllable deformation
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Funding
- National Natural Science Foundation of China [91123004, 11104334, 50825206, 10834012, 60801043]
- National Basic Research Program (973) of China [2009CB930502]
- Chinese Service Center for Scholar Exchange
- Outstanding Technical Talent Program of the Chinese Academy of Sciences
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Freestanding nanostructures are fundamental elements to construct three-dimensional (3D) nanodevices. The bending of nanopillars by ion irradiation can be used to produce overhanging nanostructures. In this paper, we report the bending of focused-ion-beam (FIB) grown platinum nanopillars by FIB irradiation. The results show that for nanopillars originally perpendicular to the substrate, by adjusting the relative geometry of the incident ion beam and the nanopillars, desired bending direction and shape can be achieved. Such nanostructures can be used for 3D nanodevice constructions. Besides, ion irradiation with optimized conditions can be used to improve the surface morphology of the as-deposited nanopillars. Our results suggest that the method of bending freestanding nanoobjects using FIB is likely to be advantageous to construct interconnects in 3D nanostructures towards the properties investigations of selected individual nanoobjects. (C) 2012 Elsevier B.V. All rights reserved.
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