Journal
MICROELECTRONIC ENGINEERING
Volume 98, Issue -, Pages 378-381Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2012.07.015
Keywords
Two-photon polymerization; Micro-fabrication; Three-dimensional Micro/Nanostructures; 3D Electrodes
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The integration of two-photon polymerization technology with standard microfabrication techniques is imperative for the use of this tool in micro- and nanotechnology and especially for the future commercialization of the technology. In this work, we report a novel method for the fabrication of 3D polymeric structures via a two-photon polymerization based system. The method consists of combining a two-photon polymerization system with conventional photolithography techniques in order to create 3D polymer electrodes. The functionality of the final structures was confirmed by electrochemical characterization techniques. (C) 2012 Elsevier B.V. All rights reserved.
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