Journal
MICROELECTRONIC ENGINEERING
Volume 97, Issue -, Pages 272-275Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2012.04.024
Keywords
Polymer derived ceramic; Micro/nano molding; Micro/nano replication
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This paper describes the fabrication of sub micrometer silicon oxycarbide (SiCO) ceramic structures. The method consists in replicating silicon micro/nanostructures in polydimethylsiloxane (PDMS), followed by a micro/nano molding of liquid polymer derived ceramic precursor (PDC). A dense ceramic SiCO replicated structure is obtained. In order to replicate the original structures with the highest fidelity possible, we applied a combination of coatings on the PDMS mold, in order to improve both filling and releasing. It was possible to fabricate reproducibly arrays of ceramic tips with a radius of 120 nm. (C) 2012 Elsevier B.V. All rights reserved.
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