4.4 Article

Influence of annealing temperature and measurement ambient on TFTs based on gas phase synthesized ZnO nanoparticles

Journal

MICROELECTRONIC ENGINEERING
Volume 87, Issue 11, Pages 2312-2316

Publisher

ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2010.03.009

Keywords

Zinc oxide; Thin film transistor; Nanoparticle; Printable electronics

Funding

  1. Deutsche Forschungsgemeinschaft [RTG 1161/1]

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In this paper, we report on the applicability of gas phase synthesized ZnO nanoparticles for printed electronics. Electrical characteristics of thin film transistors with an active layer based on ZnO nanoparticle dispersions are presented. A low charge carrier mobility and a low I(on)/I(off) ratio are found for the devices when measured in nitrogen atmosphere. The mobility is limited by the rough interface between semiconductor and dielectric. Additional electrical measurements in dry air reveal a dependency of the ratio on surface states of the ZnO particles. It is shown that adsorption of oxygen on ZnO nanoparticles leads to improved transistor characteristics. (C) 2010 Elsevier B.V. All rights reserved.

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