4.4 Article Proceedings Paper

Creation of super-hydrophobic siloxane-modified SU-8 microstuctures

Journal

MICROELECTRONIC ENGINEERING
Volume 86, Issue 4-6, Pages 1325-1328

Publisher

ELSEVIER
DOI: 10.1016/j.mee.2008.11.069

Keywords

Super-hydrophobic; Aspect-ratio; Sessile droplet evaporation; SU-8

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Recently, the need for super-repellent surfaces has been increasing, with applications ranging from material science to Lab-on-a-Chip diagnostics and microfluidics. We propose a novel and simple method to engineer super-hydrophobic surfaces using commercially available negative-tone resists, namely SU-8 and the photodefinable spin-on silicone elastomer, PDSE. The surface energies of fabricated materials were investigated and applied to the transition from the super-hydrophobic to hydrophilic states, occurring during liquid phase evaporation. (C) 2008 Elsevier B.V. All rights reserved.

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