Journal
MICRO & NANO LETTERS
Volume 6, Issue 9, Pages 755-758Publisher
INST ENGINEERING TECHNOLOGY-IET
DOI: 10.1049/mnl.2011.0376
Keywords
-
Funding
- NSTI, Department of Science and Technology, India
Ask authors/readers for more resources
Novel methodologies to overcome some of the difficulties in standard deposition procedures in focused ion beam (FIB) systems to fabricate 3D nanostructures are described. The geometrical restriction put on by the position of electron and ion columns and the precursor gas needles in a conventional FIB chamber, complicates the 3D fabrication process. As case studies, wide vertical walls and overhanging bridge-type structures of tungsten are fabricated. The overhanging bridge-type structure of tungsten can be used as a nanofilament for producing heat within a few micrometre distances. The heat, produced in the filament, is sensed by a tungsten-platinum nanothermocouple fabricated underneath the filament.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available