Journal
MECHATRONICS
Volume 22, Issue 5, Pages 515-521Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.mechatronics.2011.04.005
Keywords
Micro-electromechanical systems (MEMS); Pneumatic micro-actuator; Conveyance system; Deep reactive ion etching (DRIE); Micro-manipulation
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Funding
- ANR [06 ROBO 0009 03]
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This paper present a two dimensional pneumatic actuator based on silicon MEMS technology for objects micro-manipulation using tilted air jets. The device is composed of three layers stacked together, two micro-machined silicon wafers and a Pyrex glass wafer. The system is composed of a set of micro-conveyors in about 9 mm x 9 mm area. Each micro-conveyor has four nozzles and can generate tilted air-jets which allow four conveyance directions. An experiment of the conveyance of a silicon chip of 3 mm diameter and weighing approximately 2 mg was performed with pulsed air flow. (C) 2011 Elsevier Ltd. All rights reserved.
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