Journal
MECHANICAL SYSTEMS AND SIGNAL PROCESSING
Volume 23, Issue 3, Pages 957-978Publisher
ACADEMIC PRESS LTD ELSEVIER SCIENCE LTD
DOI: 10.1016/j.ymssp.2008.06.007
Keywords
Flexure hinge; Piezoelectric actuator; Scott-Russell mechanism; Dynamic modelling
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Funding
- Australian Research Council (ARC) Discovery [DP 0450944, DP 0668052]
- ARC Linkage Infrastructure, Equipment and Facilities [LE 0347024, LE 0668508]
- National Natural Science Foundation of China [50705064]
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This paper presents the design methodology and dynamic modelling of a piezo-driven flexure-based Scott-Russell mechanism for nano-manipulations. Based on finite element analysis, the Scott-Russell mechanism is monolithically constructed to provide high positioning accuracy and long-term repeatability. With consideration for the effect of the driving circuit, the dynamic model of the flexure-based Scott-Russell mechanism is established. The influence of the time constant RC on the dynamic response is investigated. The transient responses of the flexure-based Scott-Russell mechanism to three typical signals are derived based on the Laplace transform method. It is noted that the cycloidal command signal can generate vibration-free motion, and thus improve the dynamic performance of the flexure-based mechanism. Experimental tests have been carried out to verify the developed Scott-Russell mechanism and the established models. (C) 2008 Elsevier Ltd. All rights reserved.
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