Pull-in analysis of electrically actuated viscoelastic microbeams based on a modified couple stress theory

A new beam model is developed for the viscoelastic microbeam based on a modified couple stress model which contains only one material length scale parameter. The governing equations of equilibrium together with initial conditions and boundary conditions are obtained by a combination of the basic equations of modified couple stress theory and Hamilton's principle. This new beam model is then used for an electrically actuated microbeam-based MEMS structure. The dynamic and quasi-static governing equations of an electrically actuated viscoelastic microbeam are firstly given where the axial force created by the midplane stretching effect is also considered. Galerkin method is used to solve above equation and this method is also validated by the finite element method (FEM) when our model is reduced into an elastic case. The numerical results show that the instantaneous pull-in voltage, durable pull-in voltage and pull-in delay time predicted by this newly developed model is larger (longer) than that predicted by the classical beam model. A comparison between the quasi-static model results and the dynamic model results is also given.