The determination of the spring constant of T-shaped cantilevers using calibration structures

One of the most important diagnostic features of atomic force microscopy is the measurement of mechanical properties of the surface. Among a wide spectra of measuring techniques, the methods utilizing torsional oscillations of the cantilever provide high speed mapping of properties such as the stiffness, adhesion, snap-in force and energy dissipation. In order to perform quantitative measurements, one must determine the spring constant of the cantilever. In this paper, we present the utilization of high-accuracy normal force calibration structures, allowing the procedure to be carried out easily and quickly. Additionally, the results of tests confirming the efficiency of the method are presented.