Journal
MEASUREMENT SCIENCE AND TECHNOLOGY
Volume 24, Issue 4, Pages -Publisher
IOP Publishing Ltd
DOI: 10.1088/0957-0233/24/4/045401
Keywords
stereovision technology; 3D surface shape; grids-processing
Funding
- National Basic Research Program of China ('973' Project) [2010CB631005, 2011CB606105]
- National Natural Science Foundation of China [90916010, 11172151, 11072033, 11232008]
- Specialized Research Fund for the Doctoral Program of Higher Education [20090002110048]
- Tsinghua University Initiative Scientific Research Program, Program for New Century Excellent Talents in University [NCET-12-0036]
- Natural Science Foundation of Beijing, China [3122027]
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An integrated measurement method for micro 3D surface shape by a combination of stereovision technology in a scanning electron microscope (SEM) and grids-processing methodology is proposed. The principle of the proposed method is introduced in detail. By capturing two images of the tested specimen with grids on the surface at different tilt angles in an SEM, the 3D surface shape of the specimen can be obtained. Numerical simulation is applied to analyze the feasibility of the proposed method. A validation experiment is performed here. The surface shape of the metal-wire/polymer-membrane structures with thermal deformation is reconstructed. By processing the surface grids of the specimen, the out-of-plane displacement field of the specimen surface is also obtained. Compared with the measurement results obtained by a 3D digital microscope, the experimental error of the proposed method is discussed
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