4.6 Article

All metal oxide-based transparent and flexible photodetector

Journal

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 88, Issue -, Pages 86-92

Publisher

ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2018.07.027

Keywords

Metal oxide; Transparent; Flexible; Photodetector

Funding

  1. Basic Science Research Program through the National Research Foundation (NRF) of Korea, Ministry of Education [NRF-2018R1D1A1B07045336, NRF-2018R1D1A1B07049871]

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We demonstrate the fabrication and characterization of flexible and transparent photodetector based on conformally grown AgxO/TiO2/ITO layers on polyethylene terephthalate substrate. Initially, the thickness of AgxO and ITO layers were optimized via deposition time to match layers crystallinity with fixed intermediate TiO2 layer, for better optical and electrical properties. The highly transparent (> 70%) and flexible device presents the high-preforming responses over the broadband light. Under UV illumination, it showed a high responsivity (323 mA/W) and detectivity (4.2 x 10(8) Jones). Similarly, a noise equivalent power of 2.3 x 10(-9) W/Hz(1/2) is obtained, which confirmed its capability to detect light at nanowatt level. Moreover, mechanical flexibility test was performed for the flexible and transparent AgxO/TiO2/ITO device. It was found that the device is robust to have good optoelectronic performances even after 500 no. of bending cycles. Thus, the utilization of earth abundant metal-oxides can facilitate the flexibility, durability and transparency of next generation optoelectronic devices.

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