Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 26, Issue -, Pages 501-505Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2014.05.046
Keywords
Porous silicon; Corrosion; Porosity; Detection accuracy
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Funding
- National Natural Science Foundation of China [61271059]
- Natural Science Foundation Project of Chongqing [2010BB4246]
- Science and Technology Development Project of Chongqing [CSTC2012 gg-yyjs90007]
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The effect of corrosion solution on detection accuracy of gravimetric measurements for determining the porosity and thickness of porous silicon was elaborately investigated. We found that the detection accuracy was remarkably affected by temperature and the composition of corrosion solution. The 1.0 M NaOH with 20% ethanol acted as a novel corrosion solution to remove porous silicon layer, which could improve the detection accuracy of gravimetric measurements for determining the porosity and thickness of porous silicon. (C) 2014 Elsevier Ltd. All rights reserved.
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